A new deposition process working inthe pressure of 1torr has been created for the growth of titanium dioxide layers composed of nanoparticles. The Growth of Ti Oscanning electron microscopy (SEM), EDX, and Raman scattering. Respectively, the particles sizes are 2 nanoparticles has been investigated by about D1=124nm,D2=108.85nm,andD3=97.94nm.And Raman peaks are in 132.36, 182.85, 27.82, 392.59, 458.41, 503.74, 512.45, 600.92, 623.24, 631.28, and 809.08.cm-1
